SEMI EDA/Interface A standard introduction

Since the development of SECS-I (SEMI Equipment Communications Standard 1) in 1980, SEMI has advanced the standardization of semiconductor manufacturing. SECS-I laid the groundwork for communication between equipment and factory systems. Over the years, SEMI expanded its portfolio with SECS-II, GEM (Generic Equipment Model), the GEM300 suite, and the EDA (Equipment Data Acquisition)/Interface A suite, creating a comprehensive framework addressing the industry's diverse and complex needs. These standards provide a common language for communication, data exchange, and control between shop-floor equipment and IT systems. By standardizing these interactions, SEMI has ensured seamless integration across equipment from various vendors, essential for fabs. SEMI standards underpin activities like equipment communication, process control, material management, and data collection.