Semiconductor industry is Agileo Automation's historical domain of expertise.
A wide variety of equipment
We have experience controlling and connecting through SECS/GEM and GEM300 multiple equipment types:
Process
- Atomic Layer Deposition (ALD)
- Chemical Mechanical Polishing (CMP)
- Ion implanter
- Laser annealing tools
- Molecular-Beam Epitaxy (MBE)
- Oxidation furnaces
- Plasma cleaning and etchers with Inductive Coupled Plasma (ICP), Bosch Process
- Plasma Immersion Implantation
- Pulsed Laser Deposition (PLD)
- Physical Vapor Deposition (PVD)
Automation Handling
- Bare Wafer stockers
- Die bonders
- Furnace loaders
- Reticle sorters
- Semi-bare Reticle stockers
- Wafer sorters
- Cluster tools with atmospheric and vacuum robots
Metrology Test
- Automatic Test Equipment (ATE)
- Flip chip and wafer 3D Inspection
- In-situ metrology for process control
- Optical Metrology for CD (Critical Dimension) and overlay registration
Many Substrates and Carriers
We have worked with all these substrates and carriers:
- Wafer sizes from a few square millimeters for laboratories to 450mm including 150mm (6"), 200mm (8") and 300mm (12")
- Thin wafers, Taiko wafers, Wafers on wafer carrier,
- End effectors: Edge contact, Vacuum, Bernouilli optionally with Flip capability
- Wafer carriers: FOUP (Front Opening Unified Pods), FFO (FOUP For One), Open cassette, SMIF pods
- Reticles in RSP (Reticle SMIF Pods) boxes, semi-bare boxes, Canon, Nikon, ASML, Toppan, Hoya, DMS box, EUV reticles
Fabs all over the world
We have commissioned tools all over the world and we know the specific requirements of fabs (names are not disclosed for confidentiality sake):
America
- Idaho, USA
- Florida, USA
- New York, USA
- Massachusets, USA
- Canada
Europe
- Austria
- France
- Germany
- Italy
- United Kingdom
- Switzerland
Asia
- China
- Malaysia
- Singapore
- South Korea
- Taiwan
Dedicated products
Agileo Automation has capitalized on its diversified experience to develop software products that enable semiconductor OEMs to :
- Be in the right "time to market"
- Reduce their software development effort
- Focus on their core business
We propose field-proven products for the semiconductor industry:
- Agil'GEM: a SECS/GEM library to connect equipment to the Fab IT system (Host or MES)
- Agil'GEM300: a .NET/C# solution to deal with GEM300 connectivity.
- Speech Scenario: a Host or Equipment emulator to validate SECS/GEM communication before delivery
- A²ECF Semi: a software framework to develop applications controlling tools ranging from standalone process modules to complex cluster tools with multiple process modules and robotics. It also provides SECS/GEM or GEM300 connectivity and Equipment Data Acquisition (EDA also known as Interface-A)
- Agil'Sorter: an application based on A²ECF Semi to control wafer sorter tools
